Patents or Patents Pending

نویسندگان

  • Roy H. Olsson
  • J. W. Wittwer
  • Maryam Ziaei-Moayyed
چکیده

An Aluminum Nitride (AlN) MEMS resonator technology has been developed, enabling massively parallel filter and oscillator arrays on a single chip. Low loss filter banks and resonator arrays covering the 10MHz10GHz frequency range have been demonstrated, as has monolithic integration with inductors and CMOS circuitry. The high level of integration enables miniature multi-band, spectrally-aware and cognitive radios.

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تاریخ انتشار 2011